Abstract

Projection X-ray lithography has demonstrated the ability to print very fine features, (1,2) but the technical requirements of useful versions of the proposed systems are beyond the present state of the art. However, X-ray projection lithography using zone plates as the imaging elements is well within the state of art (3,4). We discuss two systems: a simple 1:1 imaging system utilizing existing X-ray masks, and a more mechanically complex reduction system.

© 1993 Optical Society of America