Soft X-ray projection optics

David Shafer

doi:10.1364/SXRAY.1991.ThE1

Soft-X-Ray Projection Lithography
Technical Digest Series (Optica Publishing Group, 1991),
paper ThE1
•https://doi.org/10.1364/SXRAY.1991.ThE1

Soft X-ray projection optics

David Shafer

Soft X-Ray Projection Lithography 1991

Monterey, California United States
10–12 April 1991
ISBN:

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X-Ray Projection Systems I (ThE)

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D. Shafer, "Soft X-ray projection optics," in Soft-X-Ray Projection Lithography, Technical Digest Series (Optica Publishing Group, 1991), paper ThE1.

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Abstract

There is a surprising variety of interesting optical designs for possible use in soft X-ray lithography. The requirements for the projection system are more difficult than those for the beam handling and mask illuminator optics, and it is only the projection optics that will be discussed here.

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