Abstract
A technology for generating surface-normal, membrane based micromechanical optical devices is described. Fabrication and performance of several of these devices is presented with a brief discussion of the telecom applications for which they were developed.
© 1999 Optical Society of America
PDF ArticleMore Like This
David Bishop
11 Photonics in Switching (PS) 1999
David Bishop
JWA4 Integrated Photonics Research (IPR) 1999
Randy Giles, Larry Stulz, Jim Walker, and Rene Ruel
WM20 Optical Fiber Communication Conference (OFC) 1999