Abstract

Cross section information is important in the study of x-ray multilayers. The traditional technique in this area is TEM. One of the limitations for TEM method is that the image is not from the surface of the sample but over an average of 10-20 nm in depth. STM, on the other hand, is a surface-sensitive technique. Comparing with TEM, STM has another advantage that STM is capable of obtaining information about the electronic structure of the materials. Like TEM, STM can also provide images with atomic lateral resolution. Potentially, STM is a very powerful tool in the study of x-ray multilayer.

© 1994 Optical Society of America