Surface Roughness and X-Ray Scattering

E.L. Church; P.Z. Takacs

doi:10.1364/PXRAYMS.1992.TuC1

Physics of X-Ray Multilayer Structures
Technical Digest Series (Optica Publishing Group, 1992),
paper TuC1
•https://doi.org/10.1364/PXRAYMS.1992.TuC1

Surface Roughness and X-Ray Scattering

E.L. Church and P.Z. Takacs

Physics of X-Ray Multilayer Structures 1992

Jackson Hole, Wyoming United States
2–5 March 1992
ISBN:

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Roughness and Nonspecular Scattering 2 (TuC)

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E. L. Church and P. Z. Takacs, "Surface Roughness and X-Ray Scattering," in Physics of X-Ray Multilayer Structures, Technical Digest Series (Optica Publishing Group, 1992), paper TuC1.

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Abstract

Interface roughness and diffusion limit the performance of x-ray multilayer (ML) stacks by generating unwanted scattering and reducing their efficiencies.

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