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Conferences > PXRAYMS > 1992 > MC > MC8

Study of ultra-thin films in multilayer structures by standing -waves and small- angle x-ray scattering techniques

A.A. Fraerman, Yu. Ya. Platonov, N.I. Polushkin, N.N. Salashchenko, S.I. Zheludeva, M.V. Kovalchuk, N.N. Novikova, I.V. Bashelhanov, and A.V. Shubnikov

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Abstract

The traditional method for LSM parameters investigation uses small angle x-ray diffraction at λ=0.1nm. The parameters of interest have been determined by comparing the theoretical angular dependencies of reflectivity as a functions of these parameters with the experimental curves.

© 1992 Optical Society of America

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