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Mo/Si multilayer coatings were fabricated at LLNL and were characterized using the Grating/Crystal Monochromator and Reflectometer attached to the Naval Research Laboratory beamline X24C at the National Synchrotron Light Source. The reflectances were measured at several angles of incidence and for both s and p polarizations. The measured reflectances were compared to calculations that included the effects of interdiffusion layers and of roughness at each interface and that were based on Henke's optical constants.
© 1992 Optical Society of America
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