Abstract

We demonstrate new electro-nanomechanically activated integrated-optical (IO) 2×2 switches with sub-milliseconds switching times. The switches consist of Mach-Zehnder interferometers (MZI's) with multimode interference couplers (MMI's) as splitters and combiners. Switching from the cross- to the bar-state is effected as follows: attached to the waveguide-chip is an "effective-refractive-index-shifting element" E in form of a micro- machined cantilever protruding over one leg of the interferometer. By nanometer-deflections of the cantilever under electrostatic forces, the width d of an air gap between the element E and the rib waveguide is changed. Thus, a phase shift of π is induced by the IO nanomechanical effect [1,2].

© 1997 Optical Society of America