Abstract
Fourier optics offers a simple and effective means for detecting defects in the fabrication processes of semiconductor devices or flat panel displays. Application to commercial equipment development will be presented.
© 1995 Optical Society of America
PDF ArticleMore Like This
Design and fabrication considerations for construction of monolithic, hybrid optical components for optical computing applications
Suzanne Wakelin and Matthew W. Derstine
OTuA2 Optical Computing (IP) 1995
Toward the Practical Application of Polymeric Optical Interconnection Technology
James T. Yardley, L. Eldada, K. M. T. Stengel, L. W. Shacklette, Chengjiu Wu, and C. Xu
MA.2 Organic Thin Films for Photonic Applications (OTF) 1995
Application of optical scatterometry to microelectronics processing
John R. McNeil, Stephen A. Coulombe, Petre C. Logofatu, Christopher J. Raymond, and S. Sohail Naqvi
LThA3 Conference on Lasers and Electro-Optics (CLEO:S&I) 1998