High quality optical Indium Tin Oxide (ITO) layers deposited by Ion Beam Sputtering (IBS)

Konstantina Kostourou; Volker Scheuer; Daniel Kopf

doi:10.1364/OIC.2022.TD.9

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper TD.9
•https://doi.org/10.1364/OIC.2022.TD.9

High quality optical Indium Tin Oxide (ITO) layers deposited by Ion Beam Sputtering (IBS)

Konstantina Kostourou, Volker Scheuer, and Daniel Kopf

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

From the session
Coatings for Free-Form Optics and Augmented Reality; Transparent Conducting Materials (TD)

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K. Kostourou, V. Scheuer, and D. Kopf, "High quality optical Indium Tin Oxide (ITO) layers deposited by Ion Beam Sputtering (IBS)," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper TD.9.

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Abstract

A study of the electrical properties of ITO layers combined with underlying optical interference layers and their optical properties and surface roughness.

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