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Conferences > OIC > 2016 > MB > MB.12

Silicon-nitride Films Deposited by PECVD Method on Silicon Substrate for Next Generation Laser Interference Gravitational Wave Detector

Huang-wei Pan, Ling-chi Kuo, Shu-yu Huang, Meng-yun Wu, Yu-hang Juang, Chia-wei Lee, and Shiuh Chao

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Abstract

We show optical properties and stress related mechanical loss for silicon nitride films deposited by plasma enhanced chemical vapor deposition (PECVD) method for application in the next generation laser interference gravitational wave detector.

© 2016 Optical Society of America

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