Effects of substrate and deposition method onto the mirror scattering

Hyun-Ju Cho; Myung-Jin Shin; Jae-Cheul Lee

doi:10.1364/OIC.2004.ME6

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2004),
paper ME6
•https://doi.org/10.1364/OIC.2004.ME6

Effects of substrate and deposition method onto the mirror scattering

Hyun-Ju Cho, Myung-Jin Shin, and Jae-Cheul Lee

Optical Interference Coatings 2004

Tucson, Arizona United States
27 June–2 July 2004
ISBN: 3-5400-0364-9

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Deposition of Optical Coatings III (ME)

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H. Cho, M. Shin, and J. Lee, "Effects of substrate and deposition method onto the mirror scattering," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2004), paper ME6.

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Abstract

Dielectric mirrors were deposited on the substrates with different surface roughness by either IBS or EB. The mirrors coated with IBS showed lower scattering than EB’s. Over ~2Å in substrate roughness, the scattering strongly depended on the roughness of the substrate.

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