Spectroscopic Ellipsometric Characterization of TiO2/Ag/TiO2 Optical Coatings

K. Memarzadeh; J. A. Woollam; A. Belkind

doi:10.1364/OIC.1988.WC14

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1988),
paper WC14
•https://doi.org/10.1364/OIC.1988.WC14

Spectroscopic Ellipsometric Characterization of TiO₂/Ag/TiO₂ Optical Coatings

K. Memarzadeh, J. A. Woollam, and A. Belkind

Optical Interference Coatings 1988

Tucson, Arizona United States
12–15 April 1988
ISBN:

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Optical Properties of Thin Films: 2 (WC)

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K. Memarzadeh, J. A. Woollam, and A. Belkind, "Spectroscopic Ellipsometric Characterization of TiO2/Ag/TiO2 Optical Coatings," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1988), paper WC14.

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Abstract

Optical constants (3000-800Å) and layer thicknesses in a three-layer glass/TiO₂/Ag/TiO₂ structure were determined using variable angle of incidence spectroscopic ellipsometry (VASE). Spectral characteristics due to plasmon effects were observed in n and k spectra for the thin silver layers.

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