Hard Carbon Layers for Wear Protection and Antireflection Purposes of Infrared Devices

Knut Enke

doi:10.1364/OIC.1984.TuD2

Third Topical Meeting on Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1984),
paper TuD2
•https://doi.org/10.1364/OIC.1984.TuD2

Hard Carbon Layers for Wear Protection and Antireflection Purposes of Infrared Devices

Knut Enke

Optical Interference Coatings 1984

Monterey, California United States
17–19 April 1984
ISBN:

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Thin-Film Devices II (TuD)

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K. Enke, "Hard Carbon Layers for Wear Protection and Antireflection Purposes of Infrared Devices," in Third Topical Meeting on Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1984), paper TuD2.

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Abstract

Hard infrared transparent carbon layers are produced by means of a hydrocarbon e-low discharge /1/. Since it has become known that their refractive index can be matched to 2.0 /2/ they are very interesting antireflection single layer coatings for germanium and silicon. Their universal chemical resistance makes them suited for heavy duty environment.

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