Automated Resin Layer Detection for Laser Direct Writing

Reinhard Caspary; Lei Zheng; Lei Zheng; Axel Günther; Axel Günther; Axel Günther; Bernhard Roth; Bernhard Roth

Optica Design and Fabrication Congress 2023 (IODC, OFT)
Technical Digest Series (Optica Publishing Group, 2023),
paper OTu3B.4

Automated Resin Layer Detection for Laser Direct Writing

Reinhard Caspary, Lei Zheng, Axel Günther, and Bernhard Roth

Optical Fabrication and Testing 2023

Québec City, Québec Canada
4–8 June 2023
ISBN: 978-1-957171-22-7

From the session
Advanced Micro-Optics Fabrication II (OTu3B)

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R. Caspary, L. Zheng, A. Günther, and B. Roth, "Automated Resin Layer Detection for Laser Direct Writing," in Optica Design and Fabrication Congress 2023 (IODC, OFT), Technical Digest Series (Optica Publishing Group, 2023), paper OTu3B.4.

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Abstract

Placing the focus of a laser direct writing system inside a photosensitive layer is a time-consuming manual step. We present an automated layer detection algorithm with reproducible sub-µm resolution, allowing for real-time tilt correction.

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