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Conferences > OFT > 2023 > OTh1B > OTh1B.5
  • Optica Design and Fabrication Congress 2023 (IODC, OFT)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper OTh1B.5

SiO2 and HfO2 e-beam single layers optical properties variations with hygrometry

A. Soutenain, M. Chorel, E. Lavastre, M. Mireles, S. Macnally, A. Rigatti, C. Ducros, and C. Dublanche-Tixier

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Abstract

Spectrophotometric reflection monitoring was performed over time to compare e-beam SiO2 and HfO2 single layers hygrometry sensitivity.

© 2023 The Author(s)

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