Abstract

Recent demands for ultraprecision machining has been for higher precision. The ELID grinding technique is widely known as a method which produces high precision ground surfaces in a short period of time.¹⁾ Aspherical optics, one typical example of super precision parts, require not only good mirror surface finish but also high form accuracy.²⁾ But it involves considerable difficulty to achieve both good mirror surface finish and high form accuracy. The authors have proposed a new form control system for achieving high form accuracy regularly and efficiently in aspherical ELID grinding, and successful results could be obtained through some experiments^3),4). But there had been some conditions, under which the profile errors could not converge because the radius of the grinding wheel decreased by the wear. This paper proposes a new form compensation method which can be applied to the condition under which the grinding wheel is much worn.

© 1998 Optical Society of America