Abstract
A mathematical model for polishing solid crystal surfaces is proposed. Method of wafes processing is offered. A suitable method and control device for surfaces on the processing machine is presented. The use of electronic–beam technologies and magnetic fluid polishing of optical surfaces is recommended. Analysis of the experimental results is done and the state of processed optical surfaces is investigated.
© 1994 Optical Society of America
PDF ArticleMore Like This
Wei Zhu, Bo Gong, Xiaoping Li, Tielin Shi, and Zirong Tang
IF5B.5 Information Optoelectronics, Nanofabrication and Testing (IONT) 2012
Xin Qiming and Gao Hong
OThA5 Optical Fabrication and Testing (OF&T) 1994
Wm. I. Kordonsky, I. V. Prokhorov, B. E. Kashevsky, S. D. Jacobs, B. E. Puchebner, Y. Hsu, D. Pietrowski, and D. Strafford
OTuB1 Optical Fabrication and Testing (OF&T) 1994