Abstract

Quantitative determination of light scattering and surface roughness of Al-films is of primary interest for several reasons. The scatter in reported optical constants of Al-films is often attributed to surface roughness /1/ although no quantitative roughness measurements have been performed. Further, aluminium coatings are extensively used on gratings and mirrors. Applications of these elements are in many cases critically dependent on the scattering level, as in raman spectroscopy and astronomical optics.

© 1987 Optical Society of America