Columnar and Nodular Growth of Thin Films

Karl H. Guenther

doi:10.1364/OFT.1982.WA6

Workshop on Optical Fabrication and Testing
Technical Digest Series (Optica Publishing Group, 1982),
paper WA6
•https://doi.org/10.1364/OFT.1982.WA6

Columnar and Nodular Growth of Thin Films

Karl H. Guenther

Optical Fabrication and Testing 1982

Palo Alto, California United States
13–15 December 1982
ISBN:

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Session V Cleaning and Coating of Optics (WA)

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K. H. Guenther, "Columnar and Nodular Growth of Thin Films," in Workshop on Optical Fabrication and Testing, Technical Digest Series (Optica Publishing Group, 1982), paper WA6.

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Abstract

It is meanwhile common knowledge that most PVD thin films usually reveal a columnar microstructure, with a few exceptions only. The microstructure depends on the deposition method, the substrate temperature and film thickness, to name only a few out of various determining parameters.

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