Wafer scale Ge-on-Si metalens for the mid-infrared

Yanyan Zhou; Qize Zhong; Zhihao Ren; Landobasa Y. M. Tobing; Yuan Hsing Fu; Rachel Ang; Bo Li; Hong Zhou; Chengkuo Lee; Lennon Y. T. Lee

doi:10.1364/OFC.2023.M4I.3

Optical Fiber Communication Conference (OFC) 2023
Technical Digest Series (Optica Publishing Group, 2023),
paper M4I.3
•https://doi.org/10.1364/OFC.2023.M4I.3

Wafer scale Ge-on-Si metalens for the mid-infrared

Yanyan Zhou, Qize Zhong, Zhihao Ren, Landobasa Y. M. Tobing, Yuan Hsing Fu, Rachel Ang, Bo Li, Hong Zhou, Chengkuo Lee, and Lennon Y. T. Lee

Optical Fiber Communication Conference 2023

San Diego California United States
5–9 March 2023
ISBN: 978-1-957171-18-0

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Passive Silicon Photonic Devices (M4I)

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Y. Zhou, Q. Zhong, Z. Ren, L. Y. M. Tobing, Y. H. Fu, R. Ang, B. Li, H. Zhou, C. Lee, and L. Y. T. Lee, "Wafer scale Ge-on-Si metalens for the mid-infrared," in Optical Fiber Communication Conference (OFC) 2023, Technical Digest Series (Optica Publishing Group, 2023), paper M4I.3.

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Abstract

We report the first demonstration of metalens devices fabricated on an 8-inch Ge-on-Si wafer for the mid-infrared regime. Experimental observations of beam focusing show good match with the design.

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