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Low-Loss Wafer-Bonded Silicon Photonic MEMS Switches

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Abstract

We report on 32x32 silicon photonic switches realized through wafer bonding. Broadband operation is demonstrated over 1260-1320 nm range. The maximum on-chip loss is measured to be 4 dB and the cross-talk is -80 dB.

© 2022 The Author(s)

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