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Conferences > OFC > 2014 > Th2A > Th2A.61

Silicon ridge waveguide directional couplers with improved tolerance to wafer-scale variations

Jared C. Mikkelsen, Wesley D. Sacher, and Joyce K. S. Poon

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Abstract

Silicon directional couplers are designed to be tolerant to width, height, coupling gap, and etch depth variations. Improvements in the wafer-scale variation of the splitting ratio are demonstrated in the IMEC Standard Passives process.

© 2014 Optical Society of America

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