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Conferences > OFC > 2007 > OTuD > OTuD3
  • Optical Fiber Communication Conference and Exposition and The National Fiber Optic Engineers Conference
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper OTuD3

Multilayer 3-D Photonics in Silicon

Prakash Koonath and Bahram Jalali

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Abstract

Three-dimensionally integrated devices have been realized in Silicon using SIMOX 3D sculpting. Devices are fabricated, for the first time, on three vertically-integrated silicon layers, paving the way towards ultra-dense opto-electronic structures in Silicon.

© 2007 Optical Society of America

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