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Conferences > ODF > 2022 > OThA4A > OThA4A_03
  • Proceedings of the 2022 International Symposium on Imaging, Sensing, and Optical Memory (ISOM) and the 13th International Conference on Optics-photonics Design and Fabrication (ODF)
  • Technical Digest Series (Optica Publishing Group, 2022),
  • paper OThA4A_03

Stereophonic Lithography Using a Parabolic Mirror Projection System and One-sided Illumination

Toshiyuki Horiuchi, Jun-ya Iwasaki, and Hiroshi Kobayashi

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Abstract

Stereophonic projection lithography using parabolic mirrors was examined. To extend the patterned area, one-sided illumination was investigated, and improved patterning performances were demonstrated. In addition, subjects to be studied further were also shown and discussed.

© 2022 IEEE

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