Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > OAM > 1993 > WBB > WBB.1

Automated deposition of multilayer coatings based on wideband optical monitoring techniques

Brian T. Sullivan

Not Accessible

Your library or personal account may give you access

Abstract

Complex optical multilayer coatings can now be reliably manufactured using a fully automated real time process control with an in-situ wideband optical monitor.

© 1993 Optical Society of America

PDF Article
More Like This
New high-rate automated deposition system for the manufacture of complex multilayer coatings - I. System description

Brian T. Sullivan, G. Clarke, T. Akiyama, N. Osborne, M. Ranger, J. A. Dobrowolski, L. Howe, A. Matsumoto, Y. Song, and K. Kikuchi
MC.2 Optical Interference Coatings (OIC) 1998

Optical Multilayer Coatings Produced with Automatic Deposition Error Compensation

Brian T. Sullivan and J. A. Dobrowolski
OThB1 Optical Interference Coatings (OIC) 1992

Deposition error compensation for optical multilayer coatings. 2: experimental results—sputtering system

Brian T. Sullivan and J. A. Dobrowolski
TuPP2 OSA Annual Meeting (FIO) 1991

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use