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One-step dry ion-exchange technique for single-mode waveguides

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Abstract

This paper describes a one-step solid-state ion-exchange process for fabrication of Ag+ ion-exchanged single-mode glass waveguides. Ag+ ions are released into the glass electrolytically from a sputtered Ag film and are diffused deeper with a postbake immediately after the field-assisted exchange. The amount of Ag+ ions in glass can be accurately controlled by the ion current, because no appreciable purely thermal diffusion from the Ag film into the glass occurs. The postbake is started by disconnecting the voltage after the desired charge is driven into the glass.

© 1990 Optical Society of America

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