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Conferences > OAM > 1989 > THFF > THFF2

Imaging x-ray lithography

D. Berreman, J. Bjorkholm, R. Freeman, T. Jewell, E. Raab, W. Silfvast, D. White, and O. Wood

Open Access Open Access

Abstract

Any new lithography that purports to produce 1/10-µm features with useful depth of focus will require imaging techniques in the soft x-ray.

© 1989 Optical Society of America

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