Abstract
Oxides of tungsten are deposited by (a) reactive evaporation of tungsten and (b) thermal evaporation of WO3. Optical properties of as-deposited films are studied. Optical parameter spectra of the films deposited on Corning 7059 glass are deduced from specrtrophotometric transmittance and reflectance characteristics. Bond properties of the WOx films are examined by Fourier transform infrared (FTIR) spectral data.
© 1987 Optical Society of America
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