Abstract

We tested a new generation of high resolution x-ray zone plates with the scanning x-ray microscope at the National Synchrotron Light Source.¹ The zone plates were fabricated by electron beam lithography at IBM.² They consist of gold rings on a silicon nitride window and have finest rings in the 68–100-nm range. The central region has a thick solid gold plating to enhance the signal-to-noise ratio in the foci. Collection efficiencies into first-, second-, and third-order foci were measured, and the nature of the first-order focus was examined in detail. The best zone plates showed negligible astigmatism and a first-order efficiency of ~5 %. One of these was used as the focusing element in scanning x-ray microscopy of biological specimens.

© 1986 Optical Society of America