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Conferences > MV > 1985 > ThA > ThA2

Laser-Scanning Inspection Microscope System

F. Merkle, J. Bille, S. Hunklinger, T. Karte, R.W. Wijnaendts, and R. Kaplan

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Abstract

A laser scanning system is described, resulting in processing speeds of up to 40 million pixels per second and spatial resolution down to 0.1 μm.

© 1985 Optical Society of America

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