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Conferences > MSBA > 1985 > WC > WC13

Doppler Shift Laser Fluorescence Spectroscopy of Sputtered and Evaporated Atoms under Argon Ion Bombardment.

W. Husinsky, G. Betz, and I. Girgis

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Abstract

Doppler Shift Laser Fluorescence Spectroscopy DSLFS with cw., single mode, tunable dye lasers is an excellent tool to study particles released from surfaces during the interaction of atoms and ions with solids /1,2/. From energy distributions of sputtered particles obtained by DSLFS, the mechanism for the particle release can be derived in many cases /2,3/. In particular, nonlinear and inelaitic effects in sputtering have been investigated extensively in recent publications /2,4,5/. In this paper we present measurements of energy and state distributions of Ca, Cr and Zr atoms released from the respective metal targets under 15 keV Argon ion bombardment. The influence of the target temperature and the oxygen concentration on the surface has been studied.

© 1985 Optical Society of America

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