First Demonstration of Sub-Wavelength Imaging at Short Wavelengths

Dennis F. Gardner; Elisabeth R. Shanblatt; Michael Tanksalvala; Xiaoshi Zhang; Benjamin R. Galloway; Christina L. Porter; Robert Karl; Charles Bevis; Bosheng Zhang; Matthew D. Seaberg; Giulia F. Mancini; Daniel E. Adams; Henry C. Kapteyn; Henry C. Kapteyn; Margaret M. Murnane; Margaret M. Murnane

doi:10.1364/LS.2017.LM3F.4

Frontiers in Optics 2017
OSA Technical Digest (online) (Optica Publishing Group, 2017),
paper LM3F.4
•https://doi.org/10.1364/LS.2017.LM3F.4

First Demonstration of Sub-Wavelength Imaging at Short Wavelengths

Dennis F. Gardner, Elisabeth R. Shanblatt, Michael Tanksalvala, Xiaoshi Zhang, Benjamin R. Galloway, Christina L. Porter, Robert Karl, Charles Bevis, Bosheng Zhang, Matthew D. Seaberg, Giulia F. Mancini, Daniel E. Adams, Henry C. Kapteyn, and Margaret M. Murnane

Laser Science 2017

Washington, D.C. United States
18–21 September 2017
ISBN: 978-1-943580-33-0

From the session
Carl E. Anderson Dissertation Award in Laser Science (LM3F)

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D. F. Gardner, E. R. Shanblatt, M. Tanksalvala, X. Zhang, B. R. Galloway, C. L. Porter, R. Karl, C. Bevis, B. Zhang, M. D. Seaberg, G. F. Mancini, D. E. Adams, H. C. Kapteyn, and M. M. Murnane, "First Demonstration of Sub-Wavelength Imaging at Short Wavelengths," in Frontiers in Optics 2017, OSA Technical Digest (online) (Optica Publishing Group, 2017), paper LM3F.4.

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Abstract

By combining tabletop 13.5nm high-harmonic EUV beams with novel ptychography reconstruction algorithms, we demonstrate diffraction-limit high-NA and sub-wavelength resolution imaging at EUV wavelengths for the first time, representing a record resolution for full-field light-based microscopy.

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