Abstract
Increasingly, modem industrial processes demand strict control of potential interferences from contaminants on substrate surfaces. Direct detection of such small amounts of contamination presents a challenging technical task, particularly if detection is to be carried out in areas that are difficult to access. We report on a new laser-based detection method for nonvolatile residue on component surfaces.
© 1992 Optical Society of America
PDF ArticleMore Like This
Irving P. Herman
CThO1 Conference on Lasers and Electro-Optics (CLEO:S&I) 1992
Brian E. Newnam and Marion L. Scott
PD3 Soft X-Ray Projection Lithography (SXRAY) 1992
Alonso Castro, Frederic Fairfield, and Brooks Shera
ThW9 OSA Annual Meeting (FIO) 1992