Table-top high-resolution ptychographic EUV imaging

W. Eschen; W. Eschen; L. Loetgering; L. Loetgering; V. Schuster; R. Klas; R. Klas; J. Limpert; J. Limpert; J. Limpert; J. Rothhardt; J. Rothhardt; J. Rothhardt

doi:10.1364/ISA.2021.IF2H.3

OSA Imaging and Applied Optics Congress 2021 (3D, COSI, DH, ISA, pcAOP)
OSA Technical Digest (Optica Publishing Group, 2021),
paper IF2H.3
•https://doi.org/10.1364/ISA.2021.IF2H.3

Table-top high-resolution ptychographic EUV imaging

W. Eschen, L. Loetgering, V. Schuster, R. Klas, J. Limpert, and J. Rothhardt

Imaging Systems and Applications 2021

Washington, DC United States
19–23 July 2021
ISBN: 978-1-943580-89-7

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Novel Imaging Technologies III (IF2H)

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W. Eschen, L. Loetgering, V. Schuster, R. Klas, J. Limpert, and J. Rothhardt, "Table-top high-resolution ptychographic EUV imaging," in OSA Imaging and Applied Optics Congress 2021 (3D, COSI, DH, ISA, pcAOP), H. Hua, B. Javidi, M. Martinez-Corral, O. Matoba, A. Stern, S. Thibault, T. Alieva, J. Ke, F. Willomitzer, F. Okten, P. Silveira, P. Banerjee, E. Stoykova, D. Chu, J. Park, F. Imai, C. Joo, M. Digman, D. Gardner, S. Gladysz, D. LeMaster, S. Basu, and O. Korotkova, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper IF2H.3.

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Abstract

Nanoscale imaging at 13.5 nm provides ideal opportunities for ‘at wavelength’ metrology. We present a setup and the latest results on lensless ptychographic imaging at 92 eV achieving sub 30 nm resolution.

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