Abstract
Laser-produces plasmas have been recognized as intense point-like sources for XUV spectroscopy and microlithography. The development of compact high-power lasers creates an opportunity to increase XUV output and cost-effectiveness of such tabletop sources. Effective coupling of laser radiation to the targets is important for achieving intense XUV radiation output and high-energy multi-charge ions production by the laser plasmas.
© 2000 IEEE
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