Abstract

A laser-based extreme ultraviolet (XUV) spectrometer, presently operating in-the spectral range of 90-100 nm with narrow bandwidth and high intensity has been built, using highpower, nanosecond lasers and nonlinear optical techniques. Compared with non-laser based light sources in the windowless regime (rare-gas discharges and synchrotrons) the laser-based spectrometer has the potential for higher resolution (presently 0.35 cm^-1 bandwidth). Because of the generation of exact harmonics, spectral calibration can be performed at the fundamental, visible wavelength leading to an absolute accuracy of 0.04 cm^-1 in the XUV.

© 1992 IQEC