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Conferences > IPRSN > 2023 > JTu4A > JTu4A.3

Fabrication and characterization of Sb-Te based thin films containing gallium

Magdalena Kotrla, Jan Gutwirth, Petr Janíček, Tomáš Halenkovič, Marek Bouška, Virginie Nazabal, and Petr Němec

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Abstract

Sb-Te thin films modified with gallium were deposited by radio-frequency magnetron co-sputtering. Deposited films were characterized focusing on their phase change behavior.

© 2023 The Author(s)

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