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Silicon Embedded High-Efficiency Grating Coupler for 125 nm Thin Silicon Nitride Waveguide

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Abstract

We demonstrate an efficient silicon-embedded grating coupler between an optical fibre and a 125 nm thin silicon nitride waveguide. The peak efficiency of apodized gratings obtained is –1.84 dB with 3 dB bandwidth over 80 nm.

© 2023 The Author(s)

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