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Conferences > IPRSN > 2023 > IM3A > IM3A.3

Wafer-scale fabrication of high-Q Ta2O5 microresonator

Hiroki Kitora, Mayu Funakoshi, Kenji Nishimoto, Kaoru Minoshima, and Naoya Kuse

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Abstract

We fabricate high-Q Ta2O5 microresonators, in which i-line UV lithography is used for the pattering of a photoresisit for wafer-scale fabrication, showing an intrinsic Q of more than 4 million for a microresonator.

© 2023 The Author(s)

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