Abstract

Linear polysilanes are polymers consisting of a long catenated silicon backbone, with two side groups, usually carbon based, attached to each Si atom in the backbone chain. Electronic and structural properties can vary significantly with the side group, but common to all polysilanes is a degree of electron delocalization along the σ-bonded backbone. This delocalization results in large oscillator strengths for excitations polarized parallel to the backbone. Absorption of UV photons decays either by UV fluorescence or scission of the polymer backbone, making these materials useful as deep UV photoresists for microlithography. These large oscillator strengths also give rise to large optical nonlinear susceptibilities.

© 1990 Optical Society of America