Abstract

Diffractive lenses are very useful to correct chromatic aberrations of lithographic projection lenses. In addition they provide the possibility to correct the Petzval curvature although they do not deliver their own contribution to it.

© 2006 Optical Society of America

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription