Resonantly driven piezoelectric MEMS for programmable photonic circuits

Mark Dong; Mark Dong; Julia M. Boyle; Kevin J. Palm; Matthew Zimmermann; Alex Witte; Andrew J. Leenheer; Daniel Dominguez; Gerald Gilbert; Matt Eichenfield; Matt Eichenfield; Dirk Englund

doi:10.1364/FIO.2023.JW4A.44

Frontiers in Optics + Laser Science 2023 (FiO, LS)
Technical Digest Series (Optica Publishing Group, 2023),
paper JW4A.44
•https://doi.org/10.1364/FIO.2023.JW4A.44

Resonantly driven piezoelectric MEMS for programmable photonic circuits

Mark Dong, Julia M. Boyle, Kevin J. Palm, Matthew Zimmermann, Alex Witte, Andrew J. Leenheer, Daniel Dominguez, Gerald Gilbert, Matt Eichenfield, and Dirk Englund

Frontiers in Optics 2023

Tacoma, Washington United States
9–12 October 2023
ISBN: 978-1-957171-29-6

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Joint Poster Session IV (JW4A)

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M. Dong, J. M. Boyle, K. J. Palm, M. Zimmermann, A. Witte, A. J. Leenheer, D. Dominguez, G. Gilbert, M. Eichenfield, and D. Englund, "Resonantly driven piezoelectric MEMS for programmable photonic circuits," in Frontiers in Optics + Laser Science 2023 (FiO, LS), Technical Digest Series (Optica Publishing Group, 2023), paper JW4A.44.

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Abstract

We report the design and characterization of piezoelectric MEMS optical modulators in large-scale programmable integrated photonics. The mechanical resonances are exploited to achieve modulation enhancement for a high-speed, periodic optical switch.

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