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III-V Photodiode Illumination with Bi-layer Silicon Nitride Grating Coupler

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Abstract

To investigate the viability of on-chip grating couplers as illuminators, we present a III-V detector illuminated with a bi-layer silicon nitride grating coupler. A responsivity of 0.233 A/W was obtained, corresponding to a measured fiber-to-detector efficiency of 40%.

© 2021 The Author(s)

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