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Conferences > EUVXRAY > 2024 > ETh4A > ETh4A.1

Atom probe tomography using an extreme ultraviolet pulsed light source

Luis Miaja-Avila, Benjamin W. Caplins, Ann N. Chiaramonti, Jake M. Garcia, and Norman A. Sanford

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Abstract

We describe an atom probe microscope that is coupled with an ultrafast extreme ultraviolet high-harmonics source to successfully trigger field ion emission from semiconductor, insulating, and cryogenically cooled organic materials.

© 2024 The Author(s)

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