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Conferences > EUVXRAY > 2016 > ES4A > ES4A.2

Picosecond, kW thin disc laser technology for LPP and FEL EUV sources

A. Endo, M. Smrz, O. Novak, H. Turcicova, J. Muzik, J. Huynh, T. Mocek, K. Sakaue, and M. Washio

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Abstract

Picosecond, high average power laser is critical in the HVM EUV source technology. 100kHz, mJ, laser is realized by thin disc laser architecture for LPP, and > MHz laser is discussed for 10kW level EUV FEL.

© 2016 Optical Society of America

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