Abstract

Pulsed laser vaporization of solid samples is a widely used technique for either analytical purposes and deposition of thin films. Investigation of the fluorescence emitted from the plume of the laser ablated species provides useful information in the material analysis and represents a diagnostic tool in the deposition process. A key parameter in the characterization of the plasma generated after the laser-target interaction is the measurement of the electron density n, and temperature T_e.

© 1994 IEEE