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Miniature ultrasound detector arrays in silicon photonics using amplitude transmission monitoring

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Abstract

Silicon-photonics is a new ultrasound-detection technology, based on optical resonators, with unparalleled miniaturization levels, sensitivities, bandwidths, and capable of producing dense resonator arrays. Conventional techniques, based on tuning a continuous-wave laser to the resonator wavelength, are not scalable due to the wavelength disparity between the resonators, requiring a separate laser for each resonator. In this work, we show that also the Q-factor and transmission peak of silicon-based resonators can be pressure sensitive, develop a readout scheme based on monitoring the amplitude transmission, and demonstrate its compatibility with optoacoustic tomography.

© 2023 SPIE

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