Abstract
Here, we describe a scalable fabrication method for single crystal diamond membrane windows that achieves three major goals with one fabrication method: providing high quality diamond, as confirmed by Raman spectroscopy; achieving homogeneously thin membranes, enabled by ion implantation; and providing compatibility with established planar fabrication via lithography and vertical etching. The membranes serve as the substrate for the fabrication of integrated diamond photonic technologies.
© 2019 The Author(s)
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