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Conferences > DP > 2019 > POS1 > 117
  • Symposium Latsis 2019 on Diamond Photonics - Physics, Technologies and Applications
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper 117
  • •https://doi.org/10.1364/DP.2019.117

Precision Micro-Optical Components in Single Crystal Diamond by Deep Reactive Ion Etching

Adrien Toros, Marcell Kiss, Teodoro Graziosi, Hamed Sattari, Pascal Gallo, and Niels Quack

Open Access Open Access

Abstract

We present a method to fabricate fully released thick single crystal diamond components and demonstrate cylindrical and compound refractive lenses. The process is based on the use of a thick SiO2 hard mask for the O2 plasma based deep reactive ion etching of the 150 µm thick diamond plate.

© 2019 The Author(s)

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